Three-fluid model of the plasma-sheath region for a planar probe immersed in an active oxygen discharge. Validity of the Boltzmann relation

Abstract

This paper studies the effect of the generation-loss processes in the plasma-sheath region close to a probe immersed in an oxygen discharge considering a three-fluid model for the charged species. A significant deviation from the Boltzmann relationship is obtained for the negative ion density when different values of the electron temperature, the negative ion temperature, the negative ion concentration, and the collision mean free path are considered.