Experimental study of the ion current to a cylindrical Langmuir probe taking into account a finite ion temperature
Author
Díaz Cabrera, Juan Manuel
Lucena Polonio, Vanessa
Fernández Palop, José Ignacio
Morales, Rut
Hernández, Miguel Ángel
Tejero del Caz, Antonio
Ballesteros, Jerónimo
Publisher
American Institute of PhysicsDate
2012Subject
Surface collisionsAnalog-to-digital converter
Current-voltage characteristic
Physics of gases
Plasma processing
Plasma diagnostics
Plasma material interactions
Plasma properties and parameters
Plasma sheaths
Electron energy distribution functions
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Show full item recordAbstract
This article deals with the experimental verification of a theoretical radial model, developed by the authors, for the sheath that surrounds a cylindrical Langmuir probe immersed in a plasma in which the positive ion temperature, Ti, is not negligibly small compared to the electron temperature, Te. The theoretical model is a generalization of the classical one developed for cold ions by Allen, Boyd, and Reynolds for the case of spherical probes, and extended by Chen for cylindrical ones. According to our theory, due to the positive ion thermal motion the ion current collected by the probe is increased with respect to the case of cold ions, so its influence must be considered in plasma diagnosis. An experimental device to accurately measure the I-V characteristic of a cylindrical probe in plasma, for which Ti/Te=0, has been developed. Very good agreement has been found between the theoretical positive ion I-V probe characteristic and the experimental values by using a Sonin plot.
Fuente
Díaz-Cabrera, J. M., Lucena-Polonio, M. V., Palop, J. I. F., Crespo, R. M., Hernández, M. A., Tejero-Del-Caz, A., & Ballesteros, J. (2012). Experimental study of the ion current to a cylindrical Langmuir probe taking into account a finite ion temperature. Journal Of Applied Physics, 111(6). https://doi.org/10.1063/1.3698313Versión del Editor
https://doi.org/10.1063/1.3698313Collections
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